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Oct.15 (Fri.) |
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Oct. 16 (Sat.) |
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Oct. 17 (Sun.) |
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8:20-8-30 |
Opening Address |
8:40-10:20 |
Session 4: Micro Fluidic & Bio Systems |
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Technical tours |
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8:30-10:00 |
Plenary Session |
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10:00-10:20 |
Coffee break |
10:20-10:40 |
Coffee break |
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10:20-12:00 |
Session 1: Systems Architectures for Microfactories |
10:40-12:00 |
Session 5: Micro Sensing |
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13:40-15:20 |
Session 2: Micro Assembly Systems & Techniques |
13:40-15:20 |
Session 6: Micro Actuation |
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15:20-15:40 |
Coffee break |
15:20-15:40 |
Coffee break |
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15:40-17:00 |
Session 3: Micro Fabrication |
15:40-17:10 |
Session 7: Toward Nanofactories |
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17:00-18:30 |
Poster Session
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17:10-17:30 |
Closing Remarks
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17:30-18:10 |
Commercial Session
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October 14, 2004
Thursday
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18:00-20:00 |
Registration and reception |
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October 15, 2004
Friday
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Plenary Session ( Chair: Jiaru Chu and
R.Maeda)
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8:20-8:30 |
Opening Address Wang Yuelin, Shanghai
Institute of micro System and Information Technology |
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8:30-9:00 |
Invited: K1-1 Common Design Rules
Empirically Derived from Prototyping Microfactories for Various Functional
Requirements Masayuki Nakao, Kensuke Tsuchiya, Takeshi Ooi Institute of Engineering Innovation, School of Engineering,
The University of Tokyo |
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9:00-9:30 |
Invited: K1-2 Progress in Agile Assembly: Free-Roaming Planar Motors
T.B.lauwers,
L.Z.K.Edmondson, Ralph Hollis The
Robotics Institute, Carnegie Mellon University, Pittsburgh, PA USA |
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9:30-10:00 |
Invited: K1-3 Some Developing
Trends on mechatronic Technologies Zhenbang GONG Dept. of Precision Mechanical Engineering, School of
Mechatronic Engineering and Automation, Shanghai University, Shanghai, China |
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10:00-10:20 |
Coffee break |
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Session 1: Systems
Architectures for Microfactories ( Chair: R. Hollis and H. Aoyama)
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10:20-10:40 |
Key Note:
O1-1
D
ESKTOP MICRO DRILLING AND ASSEMBLING SYSTEM BY MICROROBOTS - Combination of
Global and Local Positioning System
Yutaka Wakikaido, Takashi Kawai, Shirou Kayano, Daigo Misaki,
Ohmi Fuchiwaki, Takashi Usuda, Hisayuki Aoyama Department of Mechanical Engineering and Intelligent System,
University of Electro-Communications, Japan |
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10:40-11:00 |
O1-2 High
Precision Robotics System for Scanning Electron Microscopes
S. Mazerolle1, R. Rabe1, S. Fahlbusch2,
J. Michler2, J.-M. Breguet1 1 Swiss Federal Institute of Technology (EPFL), Lausanne,
Switzerland 2 Swiss Federal Laboratories for Materials Testing and
Research (EMPA), Thun, Switzerland |
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11:00-11:20 |
O1-3 SPECIFICATIONS OF
TECHNICAL INFORMATION SYSTEM DEDICATED TO A REORGANIZABLE AND RECONFIGURABLE
MICROFACTORY Eric Descourvières1, Dominique Gendreau1, Philippe Lutz1,
François Kiefer2 1 Laboratoire d’Automatique de Besançon
(LAB), ENSMM, UFC, UMR CNRS 6596, France 2 Laboratoire d’Ingénierie de Conception,
Cognition et Intelligence Artificielle (LICIA), INSA de Strasbourg, France |
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11:20-11:40 |
O1-4 DEVELOMENT
OF A DESK-TOP MILLING MACHINE WITH A 300 KRPM SPINDLE AND A LINEAR MOTOR
STAGE
Yuichi
Okazaki The National Institute of Advanced
Industrial Science and Technology, Japan |
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11:40-12:00 |
O1-5 TOWARDS
FULLY AUTOMATED MICROHANDLING
Sergej Fatikow, Axel Kortschack, Helge Hülsen, Torsten
Sievers, Thomas Wich University of Oldenburg, Division Microrobotics and Control
Engineering, 26111 Oldenburg, Germany |
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Session 2: Micro Assembly Systems
& Techniques (Chair: B.J. Nelson and
Y. Okazaki)
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13:40-14:00 |
Key Note: O2-1 Design of a
Visually Guided 6 DOF Micromanipulator System for 3D Assembly of Hybrid MEMS Bradley
E. Kratochvil, Kemal Berk Yesin, Vincent Hess, Bradley J. Nelson Institute
of Robotics and Intelligent Systems Swiss Federal Institute of Technology
(ETH), Zurich
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14:20-14:20 |
O2-2 STUDY OF SOME KEY PROBLEMS IN
MICROMANIPULATION-ORIENTED REAL-TIME HUMAN-COMPUTER INTERACTIVE TELE-OPERATION Xu Zheng, Liu Chong, Wang Liding, Wang Song Dalian University of Technology, School of Mechanical
Engineering, China |
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14:20-14:40 |
O2-3 Modeling
and control of a highly modular microassembly system
Micky Rakotondrabe, Yassine Haddab, Philippe Lutz Laboratoire
d’Automatique de Besançon, Besançon, France |
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14:40-15:00 |
O2-4 Ambient Environmental
Effects in Micro/Nano Handling Quan Zhou, Bo Chang,
Heikki Koivo Control Engineering Laboratory, Helsinki University of
Technology, PL 5500, 02015 TKK, Espoo, Finland |
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15:00-15:20 |
O2-5 AUTOMATED CELL MANIPULATION SYSTEM BY USE OF VISUAL
INFORMATION Libo Zhou, Zhongjun Qiu, Keisuke Nishida, Tomohiko Ishikawa,
Jun Shimizu, Hiroshi Eda Department of Systems Engineering, Ibaraki University, 4-12-1
Nakanarusawa, Hitachi 316-8511, Japan |
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15:20-15:40 |
Coffee break |
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Session 3: Micro Fabrication ( Chair: Y. Saotome and Qingan Huang)
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15:40-16:00 |
Key Note:
O3-1
Microfactory cells for microforming and micromaterials testing Yasunori
Saotome Dept. of
Nano-Material Systems, Graduate school of Engineering, Gunma University,
Japan |
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16:00-16:20 |
O3-2 SACE in
Microfactory
K. Fujisaki a, Ph. Couty b , R. Wüthrich a, L.A. Hof c, H.
Bleuler a a Laboratory of Robotic Systems, EPFL, Ch-1015 Lausanne,
Switzerland b Institute of Applied Optics, EPFL, Ch-1015 Lausanne,
Switzerland c Delft University of Technology, Advanced Mechatronics,
Mekelweg 2, 2628 CD Delft, The Netherlands |
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16:20-16:40 |
O3-3 A
Low-cost and High-throughput MEMS Fabrication Method Compatible with IC
Manufacturing Technology
Xiqiu
Fan, Sheng Liu, Honghai Zhang, Zhiwen Wu, Xiaofeng Hu,
Institute of
Micro-Systems, Huazhong University of Science & Technology, Wuhan,
430074, China |
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16:40-17:00 |
P3-40
MICROFORMING:
STUDY OF GRAIN SIZE AND FRICTION EFFECTS IN THE EXTRUSION OF MICROPINS
Neil Krishnan 1, Jian Cao 1, Kornel F. Ehmann 1 and Samuel
Owusu-Ofori 2 1 Department of Mechanical Engineering, Northwestern
University 2145 Sheridan Road, Evanston, IL-60201, USA 2 Department of Mechanical Engineering, North Carolina A&T
Greensboro, NC 27411, USA |
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17:00-18:30 |
Poster Session
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October 16, 2004
Saturday
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Session 4: Micro
Fluidic and
Bio Systems ( Chair: S. Shoji and Liding Wang, or
Z. Zhou)
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8:40-9:00 |
Key Note: O4-1 Micro/Nano Fluidic Devices
and Elements for Bio/Chemical Applications Shuichi Shoji 1, Jeung
Sang Go 2, Masaki Kanai 1, Takahiro Arakawa 1 1 Major in Nano-Science and Nano-Technology, Waseda
University, 2-4-1, Ohkubo, Shinjuku, Tokyo 169-8555 Japan 2 School of Mechanical Engineering, Pusan National
University, Korea |
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9:00-9:20 |
O4-2 Construction and simulation of novel Segmented-Flow PCR chip Jia Xiaoyu, Niu Zhiqiang, Chenwenyuan and Zhang weiping Micro/nanometer Science and Technology Research Institute, Key
Laboratory for thin Film and Microfabrication Technology of Ministry of
Education, Shanghai Jiaotong University, 20030, Shanghai, China |
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9:20-9:40 |
O4-3 Bio-Microfactory
for Automatic In-vitrofertilization Process M. Dauge, M.
Boukallel¡è, M. Gauthier, J.
Abadie and E. Piat. Laboratory of Automation of Besancon, Besancon, France |
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9:40-10:00 |
O4-4 A PDMS Based Passive
Hydrophobic Valve Enhanced by Surface Roughness Effect Yanying Feng, Zhaoying Zhou, Xiongying Ye Department
of Precision Instruments & Mechanology Tsinghua University, Beijing,
China |
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10:00-10:20 |
O4-5 Improvements of
Micro-electroforming process for micro-fluidic chips’ molds in hot embossing Liu Chong, Chu Denan, Luo Yi, Lou Zhifeng, Wang Liding Research Center of Micro System, Dalian University of
Technology |
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10:20-10:40 |
Coffee break |
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Session 5: Micro Sensing (
Chair: T. Itoh and Tao Mei )
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10:40-11:00 |
O5-1 An integrated micro laser blood flowmeter R. Sawada, E. Higurashi*, S. Sakano**, and T. Ito*** Department of Intelligent Machinery and Systems, Kyushu
university, Japan *Research Center for Advanced Science and Technology, The
University of Tokyo, Japan ** Department of Mechanical Engineering, Nihon university,
Japan *** Faculty of Engineering, Toin university of
Yokohama, Japan |
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11:00-11:20 |
O5-2 Characterizing the
Behaviour of Micro electromechanical Structures by Optical Interferometry Hu Xiaodong, Guo Tong, Hu Chunguang, Li Dachao, Hu Xiaotang State Key Laboratory of Precision Measuring Technology and Instruments,
Tianjin University, Tianjin 300072, China |
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11:20-11:40 |
O5-3 New type
piezoresistors base on undoped double-barrier resonant tunneling
microstructure Xue Chenyang,
Zhang
Wendong, Xiong Jijun, Wen Tingdun Key Laboratory of Instrumentation Science & Dynamic
Measurement of Ministry Education, North China University of Science and
Technology, Taiyuan, Shanxi, 030051, P.R.China |
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11:40-12:00 |
O5-4 Study of gas
ionization sensors based on randomly aligned single-walled carbon nanotubes Bingyong Yan, Yafei Zhang, Dong Xu Key Laboratory for Thin Film and Microfabrication Technology
of Ministry of Education, Research Institute of Micro/Nanometer Science and
Technology, Shanghai Jiaotong University, Shanghai, 200030, China |
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Session 6: Micro Actuation ( Chair: H. Bleuler and
Xinxin Li)
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13:40-14:00 |
O6-1
Performance
Evaluation of Tele-operation for Manipulating Micro Objects
Daisuke Nishi 1, Tatsuo Arai 1, Kenji Inoue 1, Tomohito Takubo
1, Tamio Tanikawa 2 1 Graduate School of Engineering Science, Osaka University,
Japan 2 National Institute of Advanced Industrial Science and
Technology, Japan |
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14:20-14:20 |
O6-2 Ultrasonic longitudinal vibration actuator and
micromanipulator applying the actuators Yoshiaki Hata KONICA MINOLTA OPTO,INC. New
Business Development Division, Japan |
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14:20-14:40 |
O6-3
Development
of a Mini-actuator Based on Giant Magnetostrictive Materials
Bintang
YANG(a,b), Christine PRELLE(b), Marc BONIS(b), Hua TAO(a),Fredric LAMARQUE(b)
(a)
Northwestern Polytechnical University, Xi’an, China
(b)
University of Technology of Compiègne, Compiègne, France
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14:40-15:00 |
O6-4
A
Micro Colloid Thruster Prototype
Jijun Xiong1,2, Zhaoying Zhou1, Dong Sun3, Wendong Zhang2 1 Department of Precision Instruments and Mechanology,
Tsinghua University, Beijing, P. R. China 2 Department of Electronic Science and Technology, North China
Institute of Technology, China 3 Department of Manufacturing engineering & engineering
management, City University of Hongkong |
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15:00-15:20 |
O6-5 Microthrusters
for Nanosatellites
Giulio Manzoni 1,2; Sohei Matsumoto 2; Ryutaro
Maeda2 1 Microspace,
Via Filzi 6 – 34100, Trieste – Italy 2 MEMS and Packaging Group, AIST
-Tsukuba |
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15:20-15:40 |
Coffee break |
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Session 7: Toward Nanofactories ( Chair: K.Virwani and M.
Nakao)
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15:40-16:00 |
Invited: O7-1 Design
and Fabrication of a Nanomechanical Machining System for a Nano-Fab
Lab-on-a-Chip: A Novel Nanofactory Chad
B. O’Neal1, Kumar Virwani1 and Ajay P. Malshe1,2 1Microelectronics-Photonics
Program, University of Arkansas, Fayetteville, 72701 2Department
of Mechanical Engineering Department, University of Arkansas, Fayetteville,
72701 *Current address:
Institute for Micromanufacturing, Mechanical Engineering, Louisiana Tech
University
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16:00-16:20 |
O7-2
Nano/Microassembly
by Dielectrophoresis
Yong
J. Yuan, Mike K. Andrews and Barry K. Marlow
Industrial
Research Ltd., Crown Research Institutes, PO Box 31-310, Lower Hutt, New
Zealand
|
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16:20-16:40 |
O7-3
Nano
Factory by Focused Ion Beam
Koji Iwasaki 1, Masanao Munekane 1, Toshitada Takeuchi 1,
Toshiharu Kogure 2, Yukimitsu Kijima 2, Masakatsu Hasuda 1, Toshiaki Fujii 1 1 SII NanoTechnology Inc. 36-1, Takenoshita, Oyama-cho, Sunto-gun,
Shizuoka 410-1393, Japan 2 Seiko Instruments Inc. 8, Nakase 1-chome, Mihama-ku,
Chiba-shi, Chiba 261-8507, Japan |
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16-40-17:10 |
O7-4
Nanoimprint
based on spin-coating
Pan Gu, Jingquan Liu, Hongwen Sun, Di
Chen, Jianhua Li "Thin Film
and Microfabrication" Key Laboratory of Ministry of Education, National
Labortary of Micro/Nano FabricationTechnology, Research Institute of
Micro/Nanometer Science and Technology,Shanghai Jiaotong University,
Shanghai, 20030, R.P China |
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17:10-17:30 |
Closing remarks
Tomoaki Eiju, AIST Tsukuba
Japan T. Gaugel, IPA/FHI |
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October 17, 2004
Sunday
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Technical Tours
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Poster Session
P1-1 A high fMAX SiGe HBT with
air-bridge
Kaicheng Li, Daoguang Liu, Rongkan Liu, Jing Zhang, Rongqiang Li, Luncai
Liu, Wanjing Xu, Kaiquan He, Yukui Li1, Shiliu Xu, Gangyi Hu, Xueliang Xu,
Guangbing Chen,Ulf Koenig, Adreas Gruhle, Horst Kibbel, Ulrich Zeiler
P1-2 A MULTI
DEGREE OF FREEDOM MEASUREMENT SYSTEM FOR DETERMINING GEOMETRIC ERRORS IN A
MINIATURIZED MACHINE TOOL
Jae-Ha Lee, Yu Liu, Seung-Han Yang
P1-3 A practical
CNC lathe for microfactories
Daisuke Iijima, Sumio Ito, Akira Hayashi, Hisayuki Aoyama, Masashi
Yamanaka
P1-4 A Study on
Optimization of Miniature Machine Tool Design
Nozomu Mishima
P1-5 Construction of a
special surface for power delivery to wireless micro-electro-mechanical systems
operating on the same platform
Sylvain Martel
P1-6 Design of
calibration system of high-precise positioning table
Ge Yi-jun, Zhang Hai-tao, Cheng Wei-ming
P1-7 Development
and Characteristics on the 4 Axis Table Top Size Machine “TRIDER-X” for
Micro-fabrication
Weimin Lin, Hitoshi Ohmori, Yoshihiro Uehara, Muneaki Asami and Miyajiro
Ohmori
P1-8 Fabrication,
Modeling and Characterization of Alumina Micro Reciprocating Engine
Peng Jin, Kyle Jiang, Jiubin Tans
P1-9 In the Way
of the Second Generation of Microequipment
L. Ruiz-Huerta, A. Caballero-Ruiz, G. Ascanio, T.
Baydik, E. Kussul
P1-10 On the
Performance Advantages of Microscale Machine Tools
Hyung Wook Park, Steven Y. Liang,
P1-11 Palmtop
Surface Mount Systems composed of Molded Pantograph Mechanisms with
Large-Deflective Hinges and Links using in a One-Room Factory
Mikio Horie
P1-13 Surface
Roughness Study Based on Micro-End-Milling with a Miniaturized Machine Tool
Wei Wang, Sung-Hwan Kweon, Seung-Han Yang
P1-14 The
Integrated Fabrication System of Melt-drawn Fiber Taper and Microsphere
Resonator
Lisa Liu, Chenchun Ye,Guobin Wen, Lie Zhang, Zhiping Cai
P1-16 Research on Electromagnetic Field for
Magnetic Levitation Precision Stage
WANG Yan-feng , He Hui-Yang, LU Z